Abstract
Surface scratch defects in semiconductor manufacturing pose significant challenges due to their irregular shapes, low contrast, and varying scales. Traditional inspection methods often struggle to detect such defects reliably, especially in complex imaging scenarios. While deep learning approaches based on Convolutional Neural Networks (CNNs) have improved accuracy, they often fail to capture fine-grained edge details. To address these limitations, we propose ScratNet, a novel end-to-end scratch segmentation framework that integrates a modified Swin Transformer backbone with a tailored decoder. The decoder incorporates a Multi-Scale Dilated Aggregation (MDA) module to capture both local and global context, a Stem Integration Module (SIM) to restore spatial detail, and a Precision Refinement (PR) branch that enhances boundary sharpness using anisotropic convolutions. Through this stage-adaptive feature aggregation and boundary-aware refinement, ScratNet achieves superior accuracy on thin and irregular defects. Extensive experiments demonstrate that ScratNet consistently outperforms existing methods, providing a scalable and robust solution for automated scratch inspection in high-precision manufacturing.
Abstract (translated)
URL
https://arxiv.org/abs/2607.10214
